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Env Monitoring System
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Product Information
Env Monitoring System
반도체 제조설비의 환경을 측정하여 전송하는 장치
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Temp
Calibrated Directly in Celsius (Centigrade)
Liner + 10-mV/℃ Scale Factor
0.5℃ Ensurde Accuracy (at 25℃)
Rated for Full-55℃ to 150℃ Range
가격은 별도문의 
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Airflow
Flow Range (Seo note 1.) : 0 to 4 m/s
Calibration Gas (Seo note 2.) : Air
Accuracy : ±5% FS(25℃ characteristic)
Repeatability (Seo note 3.) : ±0.4% FS
가격은 별도문의 
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Humidity
Range : 0~100%RH
Accuracy(@ 25℃) : ±3.8%RH( 20 to 80%RH)
Accuracy(@ 25℃) : ±5.0%RH( Other Range)
가격은 별도문의 
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Ampere
Output voltage proportional to AC and DC current
Wide sensing current range 0~35 A at 5V volt
High sensitivity 55 mV/A
가격은 별도문의 
